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Elements.IJP
System Description
The Elements concept is a flexible tool allowing easy scaling from application development on a LP50 into a pilot scale production tool, or a full production system.
The tool can handle product sizes of 5, 6 and 8 inches, and depending on type of process and number of elements, have a throughput of up to 1500 wafers/hr.
Besides operating it as a single process tool, the concept is capable to run multiple processes, even at different process times.
As each element operates independently it can be adapted to its optimal process conditions (i.e. print head type/array and setting). Further a smart logistic handling system allows the user to stop each Element independently without stopping the other elements of the system, allowing maintenance on separate elements without full interruption of production.
Together with the features of the LP50 has to offer, these features offers an optimal path from product development to pilot and mass production.
Main Product Features:
- Scalable modular concept.
- Automated handling of 5, 6 or 8 inch substrates.
- Each Element consists of:
• LP50 base system.
• Handling system.
• Optional camera system on handler for:
- (Pre)-alignment.
- Broken wafer detection
- Processes:
• Inkjet printing with:
• Automatic ink refill and print head purge line.
• Laser (scribing, ablating densification)
• Capable of running single and multiple processes.
• Smart logistic system with substrate routing and tracking allowing:
• Each element to be operated at its own cycle time.
• Individual stop of each element.
• Buffer element.
• Cassette loader.
• Transfer belt to interface to other systems.
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LP50 Desktop Print System